Computer Science/Applied Mathematics Internship: Scan Predictor Diagnostics

Introduction

Are you a master student in Computer Science, Data Science or a related field like (applied) Physics, Engineering or Mathematics, looking for a graduation or apprentice internship? Do you enjoy working with data? Are you skilled in programming tools such as MATLAB or Python? Then this internship might be interesting to you!

Background information

The image alignment EUV group consists of a balanced team of about 20 junior and senior metrologists, who closely collaborate to continuously achieve the perfect alignment of patterns from reticle to wafer using expose side sensors to achieve maximum yielding dies. To reach our goal we study machine behavior to create models and sequences realized in scanner software. Our scope comprises all EUV scanners in the field, and the EUV scanners of the future, which creates for a dynamic and exciting environment to work in.

Our metrology sequencing subfunction orchestrates the behavior of powerful mechatronic modules, so that together they achieve an extraordinary combination of speed and accuracy. It’s basically the brain of ASML lithography systems. To make sure our customer can keep printing smaller and smaller features on chips using our machines, we need people who can help us create next-generation metrology products. Expose Sequence team is like the conductor of all the actions while exposing wafers. Taking into account all interdependencies are satisfied, and optimizing for maximum wafer throughput, while ensuring minimum impact to overlay performance (e.g. due to thermal or timing effects).

In ASML, a data analysis platform was implemented some time ago. The idea behind it is to provide a common analysis platform to stakeholders. ASML machines create large amounts of data in various formats. By means of plugins, different data formats can be made available in the metro analyzer. In the same way, plugins allow us to add analyzing capabilities to the platform.

Different stakeholders need to dissect the behavior and performance of our machines at various calibration steps for this reason. We use MATLAB as a framework of choice, and we want to extend our current toolbox with new facilities to better make use of the latest diagnostics data.

Your assignment

We have a prediction functionality that is used to predict the time needed to perform exposures on the wafer. For this functionality we would like to have some post processing tooling. Your assignment is to create this post processing tooling and embed it in an already existing diagnostics framework. The data will be on XML format. The existing framework already contains a tool (implemented in MATLAB) which is very similar to the tool that we need, so inspiration can be drawn from this existing tool. 

Your tasks may include, but are not limited to:

• Familiarize yourself with existing ASML Metrology tooling frameworks, diagnostics data, and data policies;

• Design, implement and validate an extension to our tooling framework;

• Document your work for knowledge transfer.

Your Profile

To be a perfect match for this internship, you:

• Are busy with your master's in computer science, data science or a related field like (applied) physics, engineering or (applied) mathematics;

• Are skilled in programming tools such as MATLAB and/or Python;

• Are familiar with object oriented design principles;

• Are able to analyze and visualize data;

• Are solution oriented and have a hands-on mentality;

• Have good communication skills in English (verbal and written).

​This is a master graduation internship with a duration of a minimum of 9 months, for 4-5 days a week, starting as soon as possible.

Please note that we can only consider students who are enrolled at an educational institution for the entire duration of the internship.

Leading with purpose

At ASML, we’ve been making giant leaps in microchip manufacturing technology since 1984, with more than 42.000 employees and over 60 locations globally. It’s a common misconception that we make microchips, but we actually design and manufacture the lithography machines that produce microchips.

We're the world’s leading supplier for the semiconductor industry and we take this responsibility very seriously. We strive to be a force for good in the world. Whether enabling energy transition, AI or helping make healthcare more accessible, the work we do at ASML helps unlock the potential of people and society.

Learning and growing

Working at ASML is a journey; an opportunity to never stop learning and growing and we see it as our responsibility

to help you unlock your potential. We offer training and development opportunities, including educational

assistance. Here at ASML, you will find an environment where you can take up multiple growth opportunities, master your competencies and make your mark in a variety of ways.

Belong at ASML

We believe you’ll do your best work when you’re supported by an inclusive environment where you can bring your full self to work. At ASML, you'll feel welcome, recognized and supported by a company that helps you thrive. We’re a highly diverse group of people. No matter who you are in our company, you can have a real influence. You’ll be empowered by flexible working and well-being programs, as well as participate in employee networks such as: ‘Women’, ‘Sports’, ‘Green’, ’Expats’, and more!

Diversity and inclusion

ASML is an Equal Opportunity Employer that values and respects the importance of a diverse and inclusive workforce. It is the policy of the company to recruit, hire, train and promote persons in all job titles without regard to race, color, religion, sex, age, national origin, veteran status, disability, sexual orientation, or gender identity. We recognize that diversity and inclusion is a driving force in the success of our company.

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